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Proceedings Paper

Photothermal microscopy of defects and laser damage morphology in Al2O3/SiO2 dielectric mirror coatings for 248 nm
Author(s): Axel Bodemann; Michael Reichling; Norbert Kaiser; Eberhard Welsch
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Paper Abstract

The cw photothermal displacement technique (PDT) has been shown to be a useful tool for the characterization of optical coatings with high lateral resolution combined with an ultrahigh sensitivity. By micrometer resolved PDT-measurements on Al2O3/SiO2 multilayer coatings we found that the non-damaged thin film systems contain a great amount of photothermal inhomogeneities (defects) with lateral sizes ranging from several micrometers to several ten micrometers that are not visible by optical microscopy. In most cases these areas of strongly enhanced displacement response originate from microdelamination, decreased thermal impedance at the film interface or absorption centers. Thermal inhomogeneities in the film normally play a minor role.

Paper Details

Date Published: 28 July 1994
PDF: 10 pages
Proc. SPIE 2114, Laser-Induced Damage in Optical Materials: 1993, (28 July 1994); doi: 10.1117/12.180927
Show Author Affiliations
Axel Bodemann, Fraunhofer Einrichtung fuer Angewandte Optik und Feinmechanik (Germany)
Michael Reichling, Freie Univ. Berlin (Germany)
Norbert Kaiser, Fraunhofer Einrichtung fuer Angewandte Optik und Feinmechanik (Germany)
Eberhard Welsch, Friedrich-Schiller-Univ. Jena (Germany)


Published in SPIE Proceedings Vol. 2114:
Laser-Induced Damage in Optical Materials: 1993
Harold E. Bennett; Lloyd L. Chase; Arthur H. Guenther; Brian Emerson Newnam; M. J. Soileau, Editor(s)

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