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Proceedings Paper

High-damage threshold antireflectors by physical-vapor-deposited amorphous fluoropolymer
Author(s): Robert Chow; Maura K. Spragge; Gary E. Loomis; Ian M. Thomas; Frank Rainer; Richard L. Ward; Mark R. Kozlowski
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Paper Abstract

High laser-resistant anti-reflective coatings were made from an amorphous fluoropolymer (Teflon AF2400) material by physical vapor deposition. Single layers of Teflon AF2400 were thermally deposited in a vacuum chamber. The refractive index and adhesion of the coatings were determined as a function of deposition rate (2 to 20 angstroms/s), substrate temperature (20 to 200 degree(s)C), and glow-discharge bias potential (-1500 to 1500 V).

Paper Details

Date Published: 28 July 1994
PDF: 11 pages
Proc. SPIE 2114, Laser-Induced Damage in Optical Materials: 1993, (28 July 1994); doi: 10.1117/12.180886
Show Author Affiliations
Robert Chow, Lawrence Livermore National Lab. (United States)
Maura K. Spragge, Lawrence Livermore National Lab. (United States)
Gary E. Loomis, Lawrence Livermore National Lab. (United States)
Ian M. Thomas, Lawrence Livermore National Lab. (United States)
Frank Rainer, Lawrence Livermore National Lab. (United States)
Richard L. Ward, Lawrence Livermore National Lab. (United States)
Mark R. Kozlowski, Lawrence Livermore National Lab. (United States)


Published in SPIE Proceedings Vol. 2114:
Laser-Induced Damage in Optical Materials: 1993
Harold E. Bennett; Lloyd L. Chase; Arthur H. Guenther; Brian Emerson Newnam; M. J. Soileau, Editor(s)

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