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Proceedings Paper

Ion beam sputtering of optical coatings
Author(s): A. F. Stewart; Samuel M. Lu; Mohammad M. Tehrani; C. Volk
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Paper Abstract

Ion beam sputtering (IBS) is an easily controlled, energetic deposition process. Thin film coatings produced using IBS are superior in terms of scatter, absorption, losses and homogeneous optical properties. The process and properties of coatings produced using IBS will be discussed.

Paper Details

Date Published: 28 July 1994
PDF: 16 pages
Proc. SPIE 2114, Laser-Induced Damage in Optical Materials: 1993, (28 July 1994); doi: 10.1117/12.180878
Show Author Affiliations
A. F. Stewart, Litton Industries/Guidance and Control Systems Div. (United States)
Samuel M. Lu, Litton Industries/Guidance and Control Systems Div. (United States)
Mohammad M. Tehrani, Litton Industries/Guidance and Control Systems Div. (United States)
C. Volk, Litton Industries/Guidance and Control Systems Div. (United States)


Published in SPIE Proceedings Vol. 2114:
Laser-Induced Damage in Optical Materials: 1993
Harold E. Bennett; Lloyd L. Chase; Arthur H. Guenther; Brian Emerson Newnam; M. J. Soileau, Editor(s)

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