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Proceedings Paper

Nonscalar properties of high groove frequency gratings for soft x-ray and XUV regions
Author(s): Leonid I. Goray
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Paper Abstract

It was found that grating efficiency in short spectral range has unpredictable changes both under the alterations in groove geometry, groove frequency, angle of incidence and wavelength; and under replacement of reflectance, i.e. under the use of another coating material with the stand point of scalar theory. As is shown, this non-scalar effect becomes greatly apparent only for high-frequency gratings (up to 3600 g/mm) and includes two aspects. They are: (1) it is impossible to predict grating efficiency under the changing of coating material (without changes of all the other parameters) by multiplication on the ratio of coating material Fresnel reflectance; (2) optimum parameters (angle of incidence, groove depth, groove width for lamellar grating) found for one kind of coating material are not optimum for another.

Paper Details

Date Published: 12 July 1994
PDF: 5 pages
Proc. SPIE 2278, X-Ray and UV Detectors, (12 July 1994); doi: 10.1117/12.180012
Show Author Affiliations
Leonid I. Goray, Integrate, Inc. (Russia)


Published in SPIE Proceedings Vol. 2278:
X-Ray and UV Detectors
Richard B. Hoover; Mark W. Tate, Editor(s)

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