Proceedings PaperNonscalar properties of high groove frequency gratings for soft x-ray and XUV regions
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It was found that grating efficiency in short spectral range has unpredictable changes both under the alterations in groove geometry, groove frequency, angle of incidence and wavelength; and under replacement of reflectance, i.e. under the use of another coating material with the stand point of scalar theory. As is shown, this non-scalar effect becomes greatly apparent only for high-frequency gratings (up to 3600 g/mm) and includes two aspects. They are: (1) it is impossible to predict grating efficiency under the changing of coating material (without changes of all the other parameters) by multiplication on the ratio of coating material Fresnel reflectance; (2) optimum parameters (angle of incidence, groove depth, groove width for lamellar grating) found for one kind of coating material are not optimum for another.