Share Email Print

Proceedings Paper

Nonscalar properties of high groove frequency gratings for soft x-ray and XUV regions
Author(s): Leonid I. Goray
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

It was found that grating efficiency in short spectral range has unpredictable changes both under the alterations in groove geometry, groove frequency, angle of incidence and wavelength; and under replacement of reflectance, i.e. under the use of another coating material with the stand point of scalar theory. As is shown, this non-scalar effect becomes greatly apparent only for high-frequency gratings (up to 3600 g/mm) and includes two aspects. They are: (1) it is impossible to predict grating efficiency under the changing of coating material (without changes of all the other parameters) by multiplication on the ratio of coating material Fresnel reflectance; (2) optimum parameters (angle of incidence, groove depth, groove width for lamellar grating) found for one kind of coating material are not optimum for another.

Paper Details

Date Published: 12 July 1994
PDF: 5 pages
Proc. SPIE 2278, X-Ray and UV Detectors, (12 July 1994); doi: 10.1117/12.180012
Show Author Affiliations
Leonid I. Goray, Integrate, Inc. (Russia)

Published in SPIE Proceedings Vol. 2278:
X-Ray and UV Detectors
Richard B. Hoover; Mark W. Tate, Editor(s)

© SPIE. Terms of Use
Back to Top