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Proceedings Paper

Design and fabrication of thin film monolithic uncooled infrared detector arrays
Author(s): Kevin Charles Liddiard; Mark H. Unewisse; Olaf Reinhold
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Paper Abstract

This paper discusses the design of monolithic thin film thermal detectors, with particular reference to the parameters which influence performance such as thermal conductance. Methods for implementing thermal isolation are described, and critical fabrication technology is outlined. Optional materials technology for thin film resistance bolometers is reviewed, and consideration is given to bias and signal conditioning techniques.

Paper Details

Date Published: 15 July 1994
PDF: 10 pages
Proc. SPIE 2225, Infrared Detectors and Focal Plane Arrays III, (15 July 1994); doi: 10.1117/12.179725
Show Author Affiliations
Kevin Charles Liddiard, Defence Science and Technology Organisation (Australia)
Mark H. Unewisse, Defence Science and Technology Organisation (Australia)
Olaf Reinhold, Defence Science and Technology Organisation (Australia)


Published in SPIE Proceedings Vol. 2225:
Infrared Detectors and Focal Plane Arrays III
Eustace L. Dereniak; Robert E. Sampson, Editor(s)

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