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Proceedings Paper

Electrostatically suspended and sensed micromechanical rate gyroscope
Author(s): Richard P. Torti; Vijay Gondhalekar; Hieu Tran; B. Selfors; S. Bart; B. Maxwell
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Paper Abstract

Currently under development at SatCon Technology Co. is a proof of principle, angular rate sensing gyroscope which operates with a closed loop, electrostatic suspension. The prototype design will utilize an ohmically isolated rotor disc driven by multi-phase radial torque actuation. The rotor will be suspended radially and axially by fields produced from appropriately placed electrode elements. Angular rate will be detected as rebalanced rotor tilt. The inclusion of shared function electrodes for the sensors and actuators will minimize VLSI micro-machining complexity. To reduce stray capacitance, sensor FET guard driver circuitry will be placed close to the VLSI structure by means of hybridized construction. Operation of key subsystems such as rebalance/rotation sensors and the electrostatic actuators will be evaluated before the prototype geometry is fixed with the aid of limited function micromachined structures. A set of these preliminary structures has recently been received after fabrication at MCNC. The structures have been examined and appear to fit our geometric and electrical specifications. Testing with electronics is underway. Results of these evaluations and the updated prototype structure designs are discussed.

Paper Details

Date Published: 13 July 1994
PDF: 12 pages
Proc. SPIE 2220, Sensing, Imaging, and Vision for Control and Guidance of Aerospace Vehicles, (13 July 1994); doi: 10.1117/12.179613
Show Author Affiliations
Richard P. Torti, SatCon Technology Corp. (United States)
Vijay Gondhalekar, SatCon Technology Corp. (United States)
Hieu Tran, SatCon Technology Corp. (United States)
B. Selfors, SatCon Technology Corp. (United States)
S. Bart, Consultants (United States)
B. Maxwell, Consultants (United States)


Published in SPIE Proceedings Vol. 2220:
Sensing, Imaging, and Vision for Control and Guidance of Aerospace Vehicles
Jacques G. Verly; Sharon S. Welch, Editor(s)

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