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Proceedings Paper

Effect of VLSI fabrication errors on kinoform efficiency
Author(s): Michael W. Farn; Joseph W. Goodman
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Paper Abstract

Computer simulations are used to investigate the effects of vlsi fabrication errors on the efficiency of kinoforms. Fabrication and error models are described. Simulation results are presented and discussed.

Paper Details

Date Published: 1 May 1990
PDF: 12 pages
Proc. SPIE 1211, Computer and Optically Formed Holographic Optics, (1 May 1990); doi: 10.1117/12.17929
Show Author Affiliations
Michael W. Farn, Stanford Univ. (United States)
Joseph W. Goodman, Stanford Univ. (United States)

Published in SPIE Proceedings Vol. 1211:
Computer and Optically Formed Holographic Optics
Ivan Cindrich; Sing H. Lee, Editor(s)

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