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Proceedings Paper

Preparation and microstructure of epitaxial multilayers with infinite layer thin films
Author(s): Toshifumi Satoh; Hideaki Adachi; Yoko Ichikawa; Kentaro Setsune; Kiyotaka Wasa
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Paper Abstract

Epitaxial multilayer thin films of SrCuO2/(Sr,Ca)CuO2 and (Sr,Ca)CuO2/(Sr,Ca)RuO3 have been prepared on (100) SrTiO3 single crystal by a multitarget RF magnetron sputtering. The XRD measurements revealed that the heteroepitaxial growth of c-plane of the infinite-layer SrCuO2 or a-plane of perovskite (Sr,Ca)RuO3 was confirmed with c-plane of infinite-layer (Sr,Ca)CuO2 on (100) SrTiO3 substrate surface. Both multilayer films were successfully constructed as we designed with a minimum layer thickness of 10 angstroms. In the TEM images of the SrCuO2/(Sr,Ca)CuO2 multilayer, there existed planar dislocations being parallel to the ac- and bc-planes, crossing the boundaries of SrCuO2 and (Sr,Ca)CuO2 layers. On the other hand, TEM measurements of the (Sr,Ca)CuO2/(Sr,Ca)RuO3 multilayers indicated that there was no dislocation which exists commonly in the infinite-layer films. Resistivities of multilayer films at room temperature were ranging from 1 to 100 m(Omega) cm and showed semiconductor-like dependence against the temperature.

Paper Details

Date Published: 29 June 1994
PDF: 8 pages
Proc. SPIE 2157, Superconducting Superlattices and Multilayers, (29 June 1994); doi: 10.1117/12.179180
Show Author Affiliations
Toshifumi Satoh, Matsushita Electric Industrial Co. Ltd. (Japan)
Hideaki Adachi, Matsushita Electric Industrial Co. Ltd. (Japan)
Yoko Ichikawa, Matsushita Electric Industrial Co. Ltd. (Japan)
Kentaro Setsune, Matsushita Electric Industrial Co. Ltd. (Japan)
Kiyotaka Wasa, Matsushita Electric Industrial Co. Ltd. (Japan)


Published in SPIE Proceedings Vol. 2157:
Superconducting Superlattices and Multilayers
Ivan Bozovic, Editor(s)

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