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Proceedings Paper

Laser-induced desorption of dimethylcadmium from silicon
Author(s): Vladimir N. Varakin; Anatoly M. Panesh; Alexander P. Simonov
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Paper Abstract

A method of laser-induced desorption mass spectrometry (LIDMS) has been used to examine the dynamics of Cd(CH3)2 chemisorption and spontaneous decomposition on n type Si(100) with native surface oxide, the pathways and efficiencies of the adsorbate desorption due to the absorption of the XeCl. laser radiation by silicon. The extremely fast processes in the adlayer re caused by the preceding irradiation of the surface of the sample by intensive (with fluences up to 0.4 J/cm2 ) laser pulses . The conet It ion between intact, dissociative, and recombination desorption pathways s responsible for the observed laser fluence dependences of the desorption of Cd(CH3)2 and its fragments.

Paper Details

Date Published: 1 July 1990
PDF: 12 pages
Proc. SPIE 1208, Laser Photoionization and Desorption Surface Analysis Techniques, (1 July 1990); doi: 10.1117/12.17879
Show Author Affiliations
Vladimir N. Varakin, Karpov Institute of Physical Chemistry (Russia)
Anatoly M. Panesh, Karpov Institute of Physical Chemistry (Russia)
Alexander P. Simonov, Karpov Institute of Physical Chemistry (Russia)

Published in SPIE Proceedings Vol. 1208:
Laser Photoionization and Desorption Surface Analysis Techniques
Nicholas S. Nogar, Editor(s)

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