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Proceedings Paper

Pattern projection by diffractive and conventional optics: a comparison
Author(s): Christiaan H. F. Velzel; Frank Wyrowski; Hans van Esdonk
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Paper Abstract

Diffractive optics can be used for the projection of patterns in, for instance, laser material processing or microlithography. We compare diffractive optics with conventional pattern projection methods with respect to efficiency, resolution and field, influence of coding and illumination. We describe an experiment in diffractive pattern projection with an excimer laser.

Paper Details

Date Published: 17 June 1994
PDF: 8 pages
Proc. SPIE 2152, Diffractive and Holographic Optics Technology, (17 June 1994); doi: 10.1117/12.178074
Show Author Affiliations
Christiaan H. F. Velzel, Phillips Ctr. for Manufacturing Technology (Netherlands)
Frank Wyrowski, Berlin Institute of Optics (Germany)
Hans van Esdonk, Phillips Ctr. for Manufacturing Technology (Netherlands)


Published in SPIE Proceedings Vol. 2152:
Diffractive and Holographic Optics Technology
Ivan Cindrich; Sing H. Lee, Editor(s)

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