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Proceedings Paper

Integrated optic switches for phased-array applications based on electrostatic actuation of metallic membranes
Author(s): Gregory A. Magel; Tseng-Hwang Lin; Lily Y. Pang; Wen-Rong Wu
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Paper Abstract

Photonic ON/OFF and routing switches can be made using alterations of the modal effective index caused by changing the cladding on a dielectric waveguide. Drumhead-like aluminum membranes are formed electrostatically pulled into contact with the waveguides, with operating times of tens to hundreds of microseconds. An ON/OFF switch (or digital modulator) with an extinction ratio of 19 dB has been demonstrated using the change in the imaginary part of the effective index of a silicon nitride rib waveguide. Routing switches based on directional couplers are under development, and their feasibility has been demonstrated with a deposited (fixed) aluminum film. The switches are fabricated on silicon using VLSI-compatible processes, and can be used to select optical time delays for phased-array signal processing.

Paper Details

Date Published: 10 June 1994
PDF: 7 pages
Proc. SPIE 2155, Optoelectronic Signal Processing for Phased-Array Antennas IV, (10 June 1994); doi: 10.1117/12.177390
Show Author Affiliations
Gregory A. Magel, Texas Instruments Inc. (United States)
Tseng-Hwang Lin, Texas Instruments Inc. (United States)
Lily Y. Pang, Texas Instruments Inc. (United States)
Wen-Rong Wu, Texas Instruments Inc. (United States)

Published in SPIE Proceedings Vol. 2155:
Optoelectronic Signal Processing for Phased-Array Antennas IV
Brian M. Hendrickson, Editor(s)

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