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Proceedings Paper

Metrology for spatial interferometry
Author(s): Yekta Gursel
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Paper Abstract

The accuracy of the relative metrology gauge developed for the proposed OSI and SONATA missions is improved to subpicometer level. An accuracy of 0.15 picometers is obtained in vacuum at time scales of a few minutes. A surface metrology gauge with an initial accuracy of (lambda) /1000 is under construction. Photometry accurate to better than 1 part in 103 for the surface metrology gauge is demonstrated using a commercial grade, 8-bit, uncooled CCD camera and a commercial grade frame grabber at time scales of 10 seconds with a resolution of 320 by 240 pixels.

Paper Details

Date Published: 9 June 1994
PDF: 8 pages
Proc. SPIE 2200, Amplitude and Intensity Spatial Interferometry II, (9 June 1994); doi: 10.1117/12.177268
Show Author Affiliations
Yekta Gursel, Jet Propulsion Lab. (United States)


Published in SPIE Proceedings Vol. 2200:
Amplitude and Intensity Spatial Interferometry II
James B. Breckinridge, Editor(s)

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