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Proceedings Paper

High-Tc superconducting antenna-coupled microbolometer on silicon
Author(s): Joseph P. Rice; Erich N. Grossman; L. J. Borcherdt; D. A. Rudman
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Paper Abstract

A process is described for fabricating antenna-coupled resistive-edge microbolometers based on the high-Tc superconductor YBa2Cu3O7 (YBCO) on silicon. The YBCO and a buffer layer of yttria-stabilized zirconia (YSZ) were grown epitaxially on silicon to minimize excess electrical noise. A silicon-micromachined YBCO/YSZ air-bridge was incorporated to minimize the thermal conductance and the heat capacity. The thermal conductance of the air-bridge was measured to be 3 X 10-6 W/K at a temperature of 100 K. At an operating temperature of 89 K, the detector is estimated to have a response time of 2 microsecond(s) , a responsivity of the 1000 V/W range, and a noise-equivalent power in the 10-12 W/Hz1/2 range at 1000 Hz.

Paper Details

Date Published: 20 May 1994
PDF: 12 pages
Proc. SPIE 2159, High-Temperature Superconducting Detectors: Bolometric and Nonbolometric, (20 May 1994); doi: 10.1117/12.176135
Show Author Affiliations
Joseph P. Rice, National Institute of Standards and Technology (United States)
Erich N. Grossman, National Institute of Standards and Technology (United States)
L. J. Borcherdt, National Institute of Standards and Technology (United States)
D. A. Rudman, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 2159:
High-Temperature Superconducting Detectors: Bolometric and Nonbolometric
Michael Nahum; Jean-Claude Villegier, Editor(s)

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