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Proceedings Paper

Synthesis and patterning of 2-10 nanometer pinhole-free organic films
Author(s): Sucheta Gorwadkar; G. K. Vinogradov; K. Senda; Ryoichi Inanami; C. Shao; Shinzo Morita
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Paper Abstract

Ultrathin films in the thickness range of 2-10 nm were deposited by plasma polymerization. An AFM (atomic force microscope) was used to evaluate the film surface uniformity. The measured surface roughness of these films is of the order of 0.1 to 0.3 nm. It suggests that uniformly smooth, pinhole free ultra thin film organic films suitable for electronic applications can be deposited by plasma polymerization. The deposited films were tested for nanometer scale patterning using an atomic force microscope. Process of contact electrification was used to deposit local electric charge on these surface enhanced reactions with some adsorbates thus creating patterns.

Paper Details

Date Published: 16 May 1994
PDF: 9 pages
Proc. SPIE 2195, Advances in Resist Technology and Processing XI, (16 May 1994); doi: 10.1117/12.175397
Show Author Affiliations
Sucheta Gorwadkar, Nagoya Univ. (Japan)
G. K. Vinogradov, Nagoya Univ. (Japan)
K. Senda, Nagoya Univ. (Japan)
Ryoichi Inanami, Nagoya Univ. (Japan)
C. Shao, Nagoya Univ. (Japan)
Shinzo Morita, Nagoya Univ. (Japan)

Published in SPIE Proceedings Vol. 2195:
Advances in Resist Technology and Processing XI
Omkaram Nalamasu, Editor(s)

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