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Proceedings Paper

Microlithography of pi-conjugated polymers
Author(s): Mohammad S. A. Abdou; Z. W. Xie; J. Lowe; Steven Holdcroft
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Paper Abstract

In this work the photochemistry and photoimaging of derivatized polythiophenes will be described. Poly(3-alkylthiophenes) are inherently photolabile. One of the photochemical products leads to cross-linking, which can be utilized in photolithography. During this process, (pi) -conjugation remains virtually intact, and conductivities remain the same as the pristine polymer. The photosensitivity of this polymer to cross-linking, and thereby, insolubilization, can be enhanced by copolymerization with thienyl moieties possessing the methacryoyl functionality. In addition to photoimaging, the stability of the conducting state will be discussed. Strategies for enhancing stabilization will be addressed with a view to assimilating organic wires into integrated circuitry.

Paper Details

Date Published: 16 May 1994
PDF: 9 pages
Proc. SPIE 2195, Advances in Resist Technology and Processing XI, (16 May 1994); doi: 10.1117/12.175388
Show Author Affiliations
Mohammad S. A. Abdou, Simon Fraser Univ. (Canada)
Z. W. Xie, Simon Fraser Univ. (Canada)
J. Lowe, Simon Fraser Univ. (Canada)
Steven Holdcroft, Simon Fraser Univ. (Canada)

Published in SPIE Proceedings Vol. 2195:
Advances in Resist Technology and Processing XI
Omkaram Nalamasu, Editor(s)

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