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Proceedings Paper

Interaction of novolak oligomers with hydrogen bond acceptors
Author(s): Tung-Feng Yeh; Jian Ping Huang; Arnost Reiser; Kenji Honda; Bernard T. Beauchemin Jr.; Rodney J. Hurditch
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Paper Abstract

Hydrogen bonding between several novolak oligomers as donors and phenylsulfoxide as acceptor was investigated as a model for the interaction of inhibitors with o,o-connected phenolic blocks in practical novolak resins. It was found that the attraction of the novolak dimer for the acceptor was more than twice as strong as that of the corresponding monomeric phenol. In a non-polar solvent, carbon tetrachloride, the higher oligomers assume cyclic conformations where all hydrogen bonds are internally saturated. There are, however, indications, that in sufficiently polar solvents these cyclic structures open up and that the acyclic oligomers then interact strongly with hydrogen bond acceptors.

Paper Details

Date Published: 16 May 1994
PDF: 10 pages
Proc. SPIE 2195, Advances in Resist Technology and Processing XI, (16 May 1994); doi: 10.1117/12.175379
Show Author Affiliations
Tung-Feng Yeh, Polytechnic Univ. (United States)
Jian Ping Huang, Polytechnic Univ. (United States)
Arnost Reiser, Polytechnic Univ. (United States)
Kenji Honda, OCG Microelectronic Materials, Inc. (United States)
Bernard T. Beauchemin Jr., OCG Microelectronic Materials, Inc. (United States)
Rodney J. Hurditch, OCG Microelectronic Materials, Inc. (United States)

Published in SPIE Proceedings Vol. 2195:
Advances in Resist Technology and Processing XI
Omkaram Nalamasu, Editor(s)

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