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Proceedings Paper

Design of an inchworm-type linear piezomotor
Author(s): Bi Zhang; Zhenqi Zhu
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Paper Abstract

This paper details the design and development of an inchworm-type linear piezomotor that consists of three piezoelectric actuators, a monolithic flexure frame, and a guideway. The design is accomplished using the finite element methods to optimize the stiffness of elastic hinges and to calculate the stress-strain field of the flexure frame. The buckling of the bolted joints and interface stiffness of the quideway, and jerking of the linear piezomotor motion, are discussed. The linear piezomotor is capable of traveling speed of 1.6 mm/s over a travel range of 300 mm with a positioning resolution of 5 nm. It also provides a stiffness of 90 N/micrometers and an output force of 200 N.

Paper Details

Date Published: 6 May 1994
PDF: 12 pages
Proc. SPIE 2190, Smart Structures and Materials 1994: Smart Structures and Intelligent Systems, (6 May 1994); doi: 10.1117/12.175214
Show Author Affiliations
Bi Zhang, Univ. of Connecticut (United States)
Zhenqi Zhu, Univ. of Connecticut (United States)


Published in SPIE Proceedings Vol. 2190:
Smart Structures and Materials 1994: Smart Structures and Intelligent Systems
Nesbitt W. Hagood, Editor(s)

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