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Proceedings Paper

Nearly time-optimal feedback control of a magnetically levitated photolithography positioning system
Author(s): James M. Redmond
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Paper Abstract

This paper focuses on the development of an approximate time- optimal feedback strategy for conducting rest-to-rest maneuvers of a magnetically levitated table. Classical switching curves are modified to account for the complexities of magnetic actuation as well as the coupling of the rigid body modes through the control. A smooth blend of time-optimal and proportional-derivative controls is realized near the destination point to correct for inaccuracies produced by the approximate time-optimal strategy. Detailed computer simulations of the system indicate that this hybrid control strategy provides a significant reduction in settling time as compared to proportional-derivative control alone.

Paper Details

Date Published: 6 May 1994
PDF: 10 pages
Proc. SPIE 2190, Smart Structures and Materials 1994: Smart Structures and Intelligent Systems, (6 May 1994); doi: 10.1117/12.175194
Show Author Affiliations
James M. Redmond, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 2190:
Smart Structures and Materials 1994: Smart Structures and Intelligent Systems
Nesbitt W. Hagood, Editor(s)

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