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Proceedings Paper

Characterization of the cathode spot in vacuum-arc deposition
Author(s): Hao Wang; Jiyan Zou; Mao-lin Li; Li-chun Cheng; Hong Lin Yang
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Paper Abstract

Characterization of the cathode spot, which connect to a vacuum dc arc on a consumable cathode as a source of material for deposition, is studied using a high speed photograph technique. For a titanium cathode, external magnetic field effects on the behavior of the cathode spot is given with respect to number, size, and motion. Lastly, some discussion to the experimental results are presented.

Paper Details

Date Published: 1 May 1994
PDF: 4 pages
Proc. SPIE 2259, XVI International Symposium on Discharges and Electrical Insulation in Vacuum, (1 May 1994); doi: 10.1117/12.174645
Show Author Affiliations
Hao Wang, Huazhong Univ. of Science and Technology (China)
Jiyan Zou, Huazhong Univ. of Science and Technology (China)
Mao-lin Li, Huazhong Univ. of Science and Technology (China)
Li-chun Cheng, Huazhong Univ. of Science and Technology (China)
Hong Lin Yang, Hunan Univ. (China)


Published in SPIE Proceedings Vol. 2259:
XVI International Symposium on Discharges and Electrical Insulation in Vacuum
Gennady A. Mesyats, Editor(s)

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