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Proceedings Paper

Photodefinable benzocyclobutene as an optical waveguide material
Author(s): Casey F. Kane; Robert R. Krchnavek
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Paper Abstract

Optical channel waveguides with single-mode dimensions have been fabricated using a photodefinable polymer system based on the benzocyclobutene resin and a bisarylazide photo- crosslinking agent. This photo-polymer offers a simple technique for fabricating optical interconnects in multi-chip modules. The processing conditions and developer selection required for the fabrication of benzocyclobutene optical waveguides is presented. With the losses in the waveguide typically less than 1 dB/cm, this material system is suitable for use in a variety of optical interconnect problems.

Paper Details

Date Published: 2 May 1994
PDF: 8 pages
Proc. SPIE 2153, Optoelectronic Interconnects II, (2 May 1994); doi: 10.1117/12.174508
Show Author Affiliations
Casey F. Kane, Washington Univ. (United States)
Robert R. Krchnavek, Washington Univ. (United States)

Published in SPIE Proceedings Vol. 2153:
Optoelectronic Interconnects II
Ray T. Chen; John A. Neff, Editor(s)

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