Share Email Print
cover

Proceedings Paper

Photodefinable benzocyclobutene as an optical waveguide material
Author(s): Casey F. Kane; Robert R. Krchnavek
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Optical channel waveguides with single-mode dimensions have been fabricated using a photodefinable polymer system based on the benzocyclobutene resin and a bisarylazide photo- crosslinking agent. This photo-polymer offers a simple technique for fabricating optical interconnects in multi-chip modules. The processing conditions and developer selection required for the fabrication of benzocyclobutene optical waveguides is presented. With the losses in the waveguide typically less than 1 dB/cm, this material system is suitable for use in a variety of optical interconnect problems.

Paper Details

Date Published: 2 May 1994
PDF: 8 pages
Proc. SPIE 2153, Optoelectronic Interconnects II, (2 May 1994); doi: 10.1117/12.174508
Show Author Affiliations
Casey F. Kane, Washington Univ. (United States)
Robert R. Krchnavek, Washington Univ. (United States)


Published in SPIE Proceedings Vol. 2153:
Optoelectronic Interconnects II
Ray T. Chen; John A. Neff, Editor(s)

© SPIE. Terms of Use
Back to Top