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Proceedings Paper

Advantages of pulse counting in microchannel plate detectors
Author(s): Steven R. Rogers
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Paper Abstract

The output signal from a multichannel plate detector (MCP) can be processed by one of two methods: pulse counting or charge accumulation. For a two-stage MCP, the output signal-to- noise ratio is nearly twice as great for pulse counting. This represents a significant advantage in low count-rate applications, such as e-beam metrology of non-conducting specimens.

Paper Details

Date Published: 1 May 1994
PDF: 2 pages
Proc. SPIE 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII, (1 May 1994); doi: 10.1117/12.174158
Show Author Affiliations
Steven R. Rogers, Opal Technologies Ltd. (United States)


Published in SPIE Proceedings Vol. 2196:
Integrated Circuit Metrology, Inspection, and Process Control VIII
Marylyn Hoy Bennett, Editor(s)

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