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Proceedings Paper

Development of a deep-UV Mirau correlation microscope
Author(s): Fang Cheng Chang; Gordon S. Kino; William K. Studenmund
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Paper Abstract

Progress is being made on the development of a deep UV interferometric microscope to operate at a wavelength of 248 nm. The eventual aim is to make measurements of 0.18 - 0.25 micrometers gate structures. The microscope employs a mercury vapor light source, an image intensifier with a CCD or vidicon camera, and quartz lenses. The device is based on the Mirau correlation microscope, and uses a Mirau interferometer with a new type of radially sectored beamsplitter. Feasibility has been demonstrated.

Paper Details

Date Published: 1 May 1994
PDF: 12 pages
Proc. SPIE 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII, (1 May 1994); doi: 10.1117/12.174156
Show Author Affiliations
Fang Cheng Chang, Stanford Univ. (United States)
Gordon S. Kino, Stanford Univ. (United States)
William K. Studenmund, Stanford Univ. (United States)


Published in SPIE Proceedings Vol. 2196:
Integrated Circuit Metrology, Inspection, and Process Control VIII
Marylyn Hoy Bennett, Editor(s)

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