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Proceedings Paper

ISO 9000: What every microlithographer should know
Author(s): Harry J. Levinson
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Paper Abstract

This paper begins with an overview of the ISO 9000 quality standards, and then discusses certain topics that are of particular significance for the microelectronics industry.

Paper Details

Date Published: 1 May 1994
PDF: 15 pages
Proc. SPIE 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII, (1 May 1994); doi: 10.1117/12.174151
Show Author Affiliations
Harry J. Levinson, IBM Corp. (United States)


Published in SPIE Proceedings Vol. 2196:
Integrated Circuit Metrology, Inspection, and Process Control VIII
Marylyn Hoy Bennett, Editor(s)

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