Share Email Print
cover

Proceedings Paper

Timely identification of yield-limiting defects through in-line automated inspection of wafers
Author(s): Mark B. Burns; Bobby R. Bell; Elizabeth A. Knowles
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published: 1 May 1994
PDF: 9 pages
Proc. SPIE 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII, (1 May 1994); doi: 10.1117/12.174125
Show Author Affiliations
Mark B. Burns, SEMATECH (United States)
Bobby R. Bell, SEMATECH and AT&T (United States)
Elizabeth A. Knowles, Tencor Instruments Inc. (United States)


Published in SPIE Proceedings Vol. 2196:
Integrated Circuit Metrology, Inspection, and Process Control VIII
Marylyn Hoy Bennett, Editor(s)

© SPIE. Terms of Use
Back to Top