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Proceedings Paper

Excimer laser technology for soft x-ray generation
Author(s): Michael F. Powers; Harry Shields
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Paper Abstract

An angularly multiplexed XeCl excimer laser system, generating pulses of 4 - 5 ns duration, has been used to investigate soft x ray generation from laser-produced plasmas. For applications in x-ray lithography, the spectral regions of 10 - 15 angstrom and around 135 angstrom have been studied. A laser to x ray conversion efficiency of 5.5% and an x ray power of > 1 W into 2 (pi) steradians have been demonstrated in the shorter wavelength band. At the longer wavelength, the effects of laser intensity and plasma recombination on conversion efficiency have been studied.

Paper Details

Date Published: 1 June 1994
PDF: 7 pages
Proc. SPIE 2115, Visible and UV Lasers, (1 June 1994); doi: 10.1117/12.172728
Show Author Affiliations
Michael F. Powers, Jamar Technology Co. (United States)
Harry Shields, Jamar Technology Co. (United States)


Published in SPIE Proceedings Vol. 2115:
Visible and UV Lasers
Richard Scheps, Editor(s)

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