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Proceedings Paper

Compact precision holographic optical probe
Author(s): Bao Hua Zhuang; Ji-Hua Zhang; Zhen Li; Keqian Lu
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Paper Abstract

The purpose of this paper is to describe a new precision displacement sensor--Compact Precision Holographic Optical Probe--with the use of holographic optical element (HOE) technology. It is a novel non-contact method for the measurement and inspection of displacement and surface quality control. The IR HOEs are made by using a computer generated hologram method. A mathematical model has been developed to analyze the performance of the probe. The initial experimental results are obtained. The probe is both compact and inexpensive.

Paper Details

Date Published: 1 March 1994
PDF: 6 pages
Proc. SPIE 2004, Interferometry VI: Applications, (1 March 1994); doi: 10.1117/12.172608
Show Author Affiliations
Bao Hua Zhuang, Tianjin Univ. (United States)
Ji-Hua Zhang, Tianjin Univ. (Hong Kong)
Zhen Li, Tianjin Univ. (China)
Keqian Lu, Tianjin Univ. (China)


Published in SPIE Proceedings Vol. 2004:
Interferometry VI: Applications
Ryszard J. Pryputniewicz; Gordon M. Brown; Werner P. O. Jueptner, Editor(s)

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