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Proceedings Paper

Dynamic measurement of tiny displacement by dimension reduction
Author(s): Yan Liu; Jingwu Xuong; Gengxian He
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Paper Abstract

In the field of displacement measurement, the traditional method usually uses a linear receiver for 1D testing and a plane array receiver for 2D testing. In this paper we describe a new method of tiny displacement measurement by dimension reduction. According to this method, a testing system of a 2D displacements is established using a linear receiver, the accuracy of the system is under 3 micrometers , and the problem that 2N-dimensional variables can be measured by N linear receivers is discussed.

Paper Details

Date Published: 1 March 1994
PDF: 5 pages
Proc. SPIE 2004, Interferometry VI: Applications, (1 March 1994); doi: 10.1117/12.172593
Show Author Affiliations
Yan Liu, Changchun Institute of Optics and Fine Mechanics (China)
Jingwu Xuong, Changchun Institute of Optics and Fine Mechanics (China)
Gengxian He, Changchun Institute of Optics and Fine Mechanics (China)

Published in SPIE Proceedings Vol. 2004:
Interferometry VI: Applications
Ryszard J. Pryputniewicz; Gordon M. Brown; Werner P. O. Jueptner, Editor(s)

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