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Proceedings Paper

Photogrammetric determination of topography of microstructures by scanning electron microscope
Author(s): Andreas Gleichmann; Johann Michael Koehler; Matthias Hemmleb; Joerg Albertz
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Paper Abstract

This paper presents a new, non-destructive technique for high resolution 3D measurements of microstructures based on digital photogrammetry.

Paper Details

Date Published: 4 April 1994
PDF: 10 pages
Proc. SPIE 2184, Three-Dimensional Microscopy: Image Acquisition and Processing, (4 April 1994); doi: 10.1117/12.172100
Show Author Affiliations
Andreas Gleichmann, Institut fuer Physikalische Hochtechnologie (Germany)
Johann Michael Koehler, Institut fuer Physikalische Hochtechnologie (Germany)
Matthias Hemmleb, Technische Univ. Berlin (Germany)
Joerg Albertz, Technische Univ. Berlin (Germany)

Published in SPIE Proceedings Vol. 2184:
Three-Dimensional Microscopy: Image Acquisition and Processing
Carol J. Cogswell; Kjell Carlsson, Editor(s)

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