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Proceedings Paper

3D images used in the localization of the defects in semiconductor devices
Author(s): George A. Stanciu; Catalin Miu; Sergiu Stejar
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Paper Abstract

Scanning optical microscopy computer assisted has the advantages that a wide range of imaging modes is possible. We have constructed a new computer assisted laser scanning which offers the possibility to obtain 2D and 3D images. The paper presents the principal hardware and software characteristics of the scanner.

Paper Details

Date Published: 4 April 1994
PDF: 9 pages
Proc. SPIE 2184, Three-Dimensional Microscopy: Image Acquisition and Processing, (4 April 1994); doi: 10.1117/12.172086
Show Author Affiliations
George A. Stanciu, Polytechnical Univ. of Bucharest (Romania)
Catalin Miu, Polytechnical Univ. of Bucharest (Romania)
Sergiu Stejar, Polytechnical Univ. of Bucharest (Romania)


Published in SPIE Proceedings Vol. 2184:
Three-Dimensional Microscopy: Image Acquisition and Processing
Carol J. Cogswell; Kjell Carlsson, Editor(s)

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