Share Email Print
cover

Proceedings Paper

Reconstruction of surface profiles using optical differentiation and confocal microscopy
Author(s): Andrew W. Kulawiec; Duncan T. Moore
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

This paper presents a technique for producing accurate surface profile measurements using optical differentiation and confocal microscopy. An experimental system based on this technique has been constructed for the purpose of surface profiling. Experimental results are presented and compared to measurements from other systems. Theoretical transfer functions are also presented to characterize system performance.

Paper Details

Date Published: 4 April 1994
PDF: 9 pages
Proc. SPIE 2184, Three-Dimensional Microscopy: Image Acquisition and Processing, (4 April 1994); doi: 10.1117/12.172084
Show Author Affiliations
Andrew W. Kulawiec, Univ. of Rochester (United States)
Duncan T. Moore, Univ. of Rochester (United States)


Published in SPIE Proceedings Vol. 2184:
Three-Dimensional Microscopy: Image Acquisition and Processing
Carol J. Cogswell; Kjell Carlsson, Editor(s)

© SPIE. Terms of Use
Back to Top