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Proceedings Paper

Phase-stepping DIC technique for reflecting surface evaluation
Author(s): Malgorzata Sochacka; Leszek Rafal Staronski
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Paper Abstract

The phase stepping DIC technique is proposed for the surface profiling of highly polished optical substrata. An easy implementation is described in a commercially available polarized light interference microscope for reflected light. Experimental results are presented.

Paper Details

Date Published: 3 May 1994
PDF: 12 pages
Proc. SPIE 1846, Phase Contrast and Differential Interference Contrast Imaging Techniques and Applications, (3 May 1994); doi: 10.1117/12.171879
Show Author Affiliations
Malgorzata Sochacka, Univ. of Santiago de Compostela (Spain)
Leszek Rafal Staronski, Institute of Applied Optics (Poland)


Published in SPIE Proceedings Vol. 1846:
Phase Contrast and Differential Interference Contrast Imaging Techniques and Applications

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