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Proceedings Paper

Implementation of phase-stepping interferometry to transmitted-light DIC microscopy for dielectric surface evaluation
Author(s): Malgorzata Sochacka; Franck Le Provost
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Paper Abstract

The phase stepping technique with dia illumination is proposed to evaluate surface relief of dielectric layers. An easy implementation is described in a commercially available polarized light interference microscope and experimental results are presented.

Paper Details

Date Published: 3 May 1994
PDF: 10 pages
Proc. SPIE 1846, Phase Contrast and Differential Interference Contrast Imaging Techniques and Applications, (3 May 1994); doi: 10.1117/12.171878
Show Author Affiliations
Malgorzata Sochacka, Univ. of Santiago de Compostela (Spain)
Franck Le Provost, I.U.T. of Angers (France)


Published in SPIE Proceedings Vol. 1846:
Phase Contrast and Differential Interference Contrast Imaging Techniques and Applications
Maksymilian Pluta; Mariusz Szyjer, Editor(s)

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