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Proceedings Paper

Spatially resolved electron-beam induced current transient spectroscopy for deep-center characterization of diamond
Author(s): Karl H. Schoenbach; T. Tessnow; Ravindra P. Joshi; Randy A. Roush; Ralf Peter Brinkmann
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Paper Abstract

Current transient spectroscopy has been used to determine the deep level structure in natural diamond up to activation energies of 1 eV. The material was activated by high-energy electrons. By varying the energy and consequently the range of the electrons in diamond, it was possible to obtain information on the depth distribution of three deep centers. The current transients were evaluated by applying a curve-fitting technique, which provides a better energy resolution than the commonly used window technique.

Paper Details

Date Published: 1 April 1994
PDF: 8 pages
Proc. SPIE 2151, Diamond-Film Semiconductors, (1 April 1994); doi: 10.1117/12.171763
Show Author Affiliations
Karl H. Schoenbach, Old Dominion Univ. (United States)
T. Tessnow, Old Dominion Univ. (United States)
Ravindra P. Joshi, Old Dominion Univ. (United States)
Randy A. Roush, Naval Surface Warfare Ctr. (United States)
Ralf Peter Brinkmann, Siemens AG (Germany)


Published in SPIE Proceedings Vol. 2151:
Diamond-Film Semiconductors
Mike A. Tamor; Mohammad Aslam, Editor(s)

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