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Proceedings Paper

Role of penetration twins in the morphological development of vapor-grown diamond films
Author(s): Mike A. Tamor; M. P. Everson
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Paper Abstract

Morphologies of vapor-deposited polycrystalline diamond films range from clean multimicron crystallites to nanocrystalline cauliflower nodules, depending on deposition conditions. While previous efforts to connect diamond film quality to growth conditions focus on competitive growth of nondiamond phases, we propose that twinning is a major controlling factor. We use a geometric construction to define growth conditions under which a given twin can outgrow and possibly bury the parent face on which it originated. We then show how the full spectrum of diamond crystallite shapes and film morphologies are explained in terms of penetration twins without reference to the actual mechanistics of diamond growth. This results in a reactor map that serves as a powerful tool in process development and control.

Paper Details

Date Published: 1 April 1994
PDF: 12 pages
Proc. SPIE 2151, Diamond-Film Semiconductors, (1 April 1994); doi: 10.1117/12.171761
Show Author Affiliations
Mike A. Tamor, Ford Motor Co. (United States)
M. P. Everson, Ford Motor Co. (United States)

Published in SPIE Proceedings Vol. 2151:
Diamond-Film Semiconductors
Mike A. Tamor; Mohammad Aslam, Editor(s)

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