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Proceedings Paper

Supersonic flow sensor using semiconductor diamond films
Author(s): Sacharia Albin; Bhaskar Bulusu; Ravindra P. Joshi; Scott Kruegel
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Paper Abstract

The frequency response of thin film sensors can be enhanced by using a film of semiconducting diamond. Conventional sensors made of metallic films such as Ni can only be used for measuring flow turbulences of the order of 60 KHz. The proposed diamond sensor can measure instabilities as high as 2 X 105 Hz. A computer simulation was carried out to compare the response of the proposed sensor with a Ni film sensor. The rationale for choosing the appropriate film and substrate materials has also been explained.

Paper Details

Date Published: 1 April 1994
PDF: 5 pages
Proc. SPIE 2151, Diamond-Film Semiconductors, (1 April 1994); doi: 10.1117/12.171760
Show Author Affiliations
Sacharia Albin, Old Dominion Univ. (United States)
Bhaskar Bulusu, Old Dominion Univ. (United States)
Ravindra P. Joshi, Old Dominion Univ. (United States)
Scott Kruegel, Old Dominion Univ. (United States)


Published in SPIE Proceedings Vol. 2151:
Diamond-Film Semiconductors
Mike A. Tamor; Mohammad Aslam, Editor(s)

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