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Proceedings Paper

CVD diamond film temperature sensors
Author(s): Mohammad Aslam; G. S. Yang; Ashraf Masood; Ronald J. Fredricks; Mike A. Tamor; Thomas Potter
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Paper Abstract

Due to a unique combination of its mechanical, electrical, thermal, and chemical properties, diamond is an excellent material for temperature and heat flux sensors. Although natural diamond and synthetic diamond thermistors were demonstrated for temperatures below 600 K already in the 1960s, they were never commercialized mainly due to high cost. Recently, there has been a renewed interest in diamond thermistors because of rapid progress in diamond film fabrication using the chemical vapor deposition (CVD) process, which can produce diamond films on nondiamond substrates such as Si at a cost comparable to any other material fabricated routinely in the IC industry. Due to these developments, there is a tremendous potential of diamond temperature sensors for high-speed and high-temperature applications, especially in harsh environments. In fact, diamond sensors may be the first application of diamond in the area of passive diamond electronic devices, because sensor structures do not require single crystal diamond and n-type doping which is difficult to achieve. In the present work, we demonstrate that p- type polycrystalline diamond thermistors show temperature and response-time ranges of 80-1373 K and 290ns-25microsecond(s) , respectively. The fabrication technology of a multisensor diamond microchip is discussed for commercialization of diamond sensors in the near term.

Paper Details

Date Published: 1 April 1994
PDF: 7 pages
Proc. SPIE 2151, Diamond-Film Semiconductors, (1 April 1994); doi: 10.1117/12.171759
Show Author Affiliations
Mohammad Aslam, Michigan State Univ. (United States)
G. S. Yang, Michigan State Univ. (United States)
Ashraf Masood, Michigan State Univ. (United States)
Ronald J. Fredricks, Research and Technology Institute of West Michigan (United States)
Mike A. Tamor, Ford Motor Co. (United States)
Thomas Potter, Ford Motor Co. (United States)

Published in SPIE Proceedings Vol. 2151:
Diamond-Film Semiconductors
Mike A. Tamor; Mohammad Aslam, Editor(s)

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