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Proceedings Paper

Scattering from diffractive optics
Author(s): D. W. Ricks
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Paper Abstract

There are a number of possible sources of scattering in diffractive optics: sloping walls, pattern depth errors, line edge errors, quantization errors, roughness, and the step wise approximation to the ideal surface. These sources of scattering can be systematic (deterministic) or random. In this paper scattering formulas for both systematic and random errors are derived using Fourier optics. These formulas can be used to explain the results of scattering measurements and computer simulations.

Paper Details

Date Published: 28 December 1993
PDF: 25 pages
Proc. SPIE 10271, Diffractive and Miniaturized Optics: A Critical Review, 102710B (28 December 1993); doi: 10.1117/12.170184
Show Author Affiliations
D. W. Ricks, Naval Air Warfare Ctr. (United States)


Published in SPIE Proceedings Vol. 10271:
Diffractive and Miniaturized Optics: A Critical Review
Sing H. Lee, Editor(s)

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