Share Email Print

Proceedings Paper

Applications of interferometry and automated inspection in Japan
Author(s): Toyohiko Yatagai
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Recent developments of interferometric techniques for industrial inspection in Japan are reviewed, with special emphasis on automatic fringe analysis, use of unique interferometers, use of advanced devices.

Paper Details

Date Published: 1 June 1993
PDF: 27 pages
Proc. SPIE 10268, Optical Inspection and Testing: A Critical Review, 102680F (1 June 1993); doi: 10.1117/12.170175
Show Author Affiliations
Toyohiko Yatagai, Univ. of Tsukuba (Japan)

Published in SPIE Proceedings Vol. 10268:
Optical Inspection and Testing: A Critical Review
James D. Trolinger, Editor(s)

© SPIE. Terms of Use
Back to Top