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Proceedings Paper

Laser-annealed Fabry-Perot fiber optic temperature sensor
Author(s): Jorge L. Sotomayor; Glenn Beheim
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Paper Abstract

A fiber-optic temperature sensor has been fabricated by first sputtering a silicon film onto the end of an optical fiber. The approximately one-micrometer thick silicon film serves as a Fabry-Perot etalon whose resonant wavelengths change as a function of temperature. The silicon film is annealed in order to stabilize its structure. This will provide a sensor with acceptable long term stability. The use of wavelength encoding fiber optic sensors provides a high degree of immunity from cable and connector effects. The benefits of this technology include reduced volume and weight, reduced cost, and improved reliability.

Paper Details

Date Published: 9 March 1994
PDF: 7 pages
Proc. SPIE 2070, Fiber Optic and Laser Sensors XI, (9 March 1994); doi: 10.1117/12.169926
Show Author Affiliations
Jorge L. Sotomayor, NASA Lewis Research Ctr. (United States)
Glenn Beheim, NASA Lewis Research Ctr. (United States)


Published in SPIE Proceedings Vol. 2070:
Fiber Optic and Laser Sensors XI
Ramon P. DePaula, Editor(s)

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