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Proceedings Paper

High-resolution optical surface topography measurements
Author(s): Hans J. Tiziani
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Paper Abstract

Optical methods are becoming interesting tools for high-resolution surface topography measurements. Micro- and macrostructure measurement techniques were developed to measure surface topography with resolutions of one micrometer or better. The progress made in the last few years is due to the development of the laser and solid state detector elements together with very powerful computer support for the processing of information. Methods for optical surface topography measurements based on the confocal principle and interferometry, together with future trends and some limitations, are discussed.

Paper Details

Date Published: 1 March 1994
PDF: 10 pages
Proc. SPIE 2252, Optical 3D Measurement Techniques II: Applications in Inspection, Quality Control, and Robotics, (1 March 1994); doi: 10.1117/12.169835
Show Author Affiliations
Hans J. Tiziani, Univ. Stuttgart (Germany)


Published in SPIE Proceedings Vol. 2252:
Optical 3D Measurement Techniques II: Applications in Inspection, Quality Control, and Robotics
Armin Gruen; Heribert Kahmen, Editor(s)

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