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Proceedings Paper

Fourier analysis of complex filtering in the transform plane for obtaining nanometric surface profiles
Author(s): Jan H. Rakels
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Paper Abstract

The application of phase complex filtering in the transform plane of an imaging system is investigated, by derivation of analytical relationships between surface profiles and the light intensity produced. This analysis is based upon ideal conditions. In order to investigate the behavior under realistic conditions for pure complex filtering (Phase Contrast), a computer simulation program has been devised. This program is based on the Fresnel approximation of the Kirchhoff-Fresnel diffraction integral. The approximation is implemented by using a Fourier transform equivalent. The effects on filter spot size and surface amplitude are detailed.

Paper Details

Date Published: 15 March 1994
PDF: 10 pages
Proc. SPIE 2065, Optics, Illumination, and Image Sensing for Machine Vision VIII, (15 March 1994); doi: 10.1117/12.169358
Show Author Affiliations
Jan H. Rakels, Univ. of Warwick (United Kingdom)


Published in SPIE Proceedings Vol. 2065:
Optics, Illumination, and Image Sensing for Machine Vision VIII
Donald J. Svetkoff, Editor(s)

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