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Proceedings Paper

New interferometric profiler for smooth and rough surfaces
Author(s): Paul J. Caber; Stephen J. Martinek; Robert J. Niemann
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Paper Abstract

A new method of optical, non-contact profiling of rough surfaces is described that utilizes interferometric techniques as well as digital signal processing algorithms to produce fast, accurate, repeatable 3-D surface profile measurements. When combined with more traditional phase-shifting measurement techniques, this produces an instrument capable of profiling surfaces with rms roughness, Rq, ranging from 1 angstrom to 20 micrometers , and measurement of steps up to 100 micrometers . Sample data are discussed and a comparison with other surface profiling techniques is presented.

Paper Details

Date Published: 1 February 1993
PDF: 9 pages
Proc. SPIE 2088, Laser Dimensional Metrology: Recent Advances for Industrial Application, (1 February 1993); doi: 10.1117/12.168073
Show Author Affiliations
Paul J. Caber, WYKO Corp. (United States)
Stephen J. Martinek, WYKO Corp. (United States)
Robert J. Niemann, WYKO Corp. (United States)

Published in SPIE Proceedings Vol. 2088:
Laser Dimensional Metrology: Recent Advances for Industrial Application
Michael J. Downs, Editor(s)

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