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Proceedings Paper

New design of an optical profiler
Author(s): John A. Meiling Jr.; Shaun Coles
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Paper Abstract

New software algorithms are presented which extend the measurement capabilities of phase measurement microscopes without employing exotic hardware. Efficient methods for averaging data and compensating for common electrical artifacts produce measurements of 0.2 Angstroms rms instrument noise, regardless of the orientation of the interference pattern. A method for calculating the fringe order for each phase data point allows measurement of discontinuous surfaces without the usual phase unwrapping problems.

Paper Details

Date Published: 1 February 1993
PDF: 4 pages
Proc. SPIE 2088, Laser Dimensional Metrology: Recent Advances for Industrial Application, (1 February 1993); doi: 10.1117/12.168068
Show Author Affiliations
John A. Meiling Jr., Micromap Corp. (United States)
Shaun Coles, Burleigh Instruments (United Kingdom)


Published in SPIE Proceedings Vol. 2088:
Laser Dimensional Metrology: Recent Advances for Industrial Application
Michael J. Downs, Editor(s)

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