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Proceedings Paper

Mass-limited laser-plasma cryogenic target for 13 nm point x ray sources for lithography
Author(s): Feng Jin; Kai Gabel; Martin C. Richardson; Masataka Kado; Andrew F. Vasil'ev; Daniel Salzmann
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Paper Abstract

We propose the use of mass-limited, line emitting cryogenic targets for SXPL, which permit a continuous supply of targets without the problem of particulate debris and excessive heating of multilayer optics by an intense x-ray flux in wavelength regions outside the multilayer bandwidth. In preliminary experiments we measured the oxygen line emission in the vicinity of 13 nm. The x-ray emitting plasma was produced by using a laser intensity of 2 X 1012 W/cm2 on the surface of an ice target. From the observed crater on target we can deduce that clusters are also ejected from cryogenic targets.

Paper Details

Date Published: 1 February 1994
PDF: 9 pages
Proc. SPIE 2015, Applications of Laser Plasma Radiation, (1 February 1994); doi: 10.1117/12.167993
Show Author Affiliations
Feng Jin, CREOL/Univ. of Central Florida (United States)
Kai Gabel, CREOL/Univ. of Central Florida (United States)
Martin C. Richardson, CREOL/Univ. of Central Florida (United States)
Masataka Kado, CREOL/Univ. of Central Florida (United States)
Andrew F. Vasil'ev, CREOL/Univ. of Central Florida (United States)
Daniel Salzmann, CREOL/Univ. of Central Florida (United States)


Published in SPIE Proceedings Vol. 2015:
Applications of Laser Plasma Radiation
Martin C. Richardson, Editor(s)

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