Share Email Print
cover

Proceedings Paper

Laser and pinch plasma x-ray sources for microscopy and lithography
Author(s): Willi Neff; D. Rothweiler; Klaus Eidmann; Rainer Lebert; Franz Richter; G. Winhart
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Experimental results on radiative properties of laser produced and pinch plasmas are discussed in comparison and with respect to the specific sets of requirements defined by proximity printing x-ray lithography and full field imaging x-ray microscopy.

Paper Details

Date Published: 1 February 1994
PDF: 13 pages
Proc. SPIE 2015, Applications of Laser Plasma Radiation, (1 February 1994); doi: 10.1117/12.167990
Show Author Affiliations
Willi Neff, Fraunhofer-Institut fuer Lasertechnik (Germany)
D. Rothweiler, RWTH-Lehrstuhl fuer Lasertechnik (Germany)
Klaus Eidmann, Max-Planck-Institut fuer Quantenoptik (Germany)
Rainer Lebert, RWTH-Lehrstuhl fuer Lasertechnik (Germany)
Franz Richter, Karl Suess KG (Germany)
G. Winhart, Max-Planck-Institut fuer Quantenoptik (Germany)


Published in SPIE Proceedings Vol. 2015:
Applications of Laser Plasma Radiation
Martin C. Richardson, Editor(s)

© SPIE. Terms of Use
Back to Top