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Proceedings Paper

Three-dimensional optical profiler using Nomarski interferometry
Author(s): Hong Gao; Qiming Xin; Robert E. Parks
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Paper Abstract

An interferometric optical profiler using Nomarski microscopy has been developed for measuring surface roughness and 3-D profiles. A commercial Nomarski differential interference contrast (DIC) microscope is modified to add a quarter-wave plate for phase- shifting. Quantitative slope data can be obtained by utilizing phase shifting techniques that rotate the analyzer to change the phase difference between the two orthogonally polarized beams. The slope data is integrated to generate surface height. The instrument is insensitive to vibration. It has measured surface features with a repeatability of better than 1 nm in an ordinary laboratory environment without vibration isolation.

Paper Details

Date Published: 1 February 1994
PDF: 4 pages
Proc. SPIE 1994, Advanced Optical Manufacturing and Testing IV, (1 February 1994); doi: 10.1117/12.167964
Show Author Affiliations
Hong Gao, Beijing Institute of Technology (United States)
Qiming Xin, Beijing Institute of Technology (China)
Robert E. Parks, Optical Sciences Ctr./Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 1994:
Advanced Optical Manufacturing and Testing IV
Victor J. Doherty, Editor(s)

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