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Proceedings Paper

Aspheric surface testing by a phase-shifting shearing interferometer
Author(s): Hong Gao; Qiming Xin; Kaixiang Huang; Robert E. Parks
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Paper Abstract

An interferometric system for aspheric surface testing is described. The system consists of a lateral shearing interferometer with a polarization phase shifter, CCD camera, a video frame grabber and a computer. A key element of the interferometer is a plane parallel birefringent plate which can give any amount of lateral shear. Phase shifting interferometry is used to obtain the derivative information of the wavefront under test. By integrating the derivative data, we have the wavefront shape. The system has measured surfaces with rms repeatability of better than (lambda) /20.

Paper Details

Date Published: 1 February 1994
PDF: 5 pages
Proc. SPIE 1994, Advanced Optical Manufacturing and Testing IV, (1 February 1994); doi: 10.1117/12.167963
Show Author Affiliations
Hong Gao, Beijing Institute of Technology (China)
Qiming Xin, Beijing Institute of Technology (China)
Kaixiang Huang, Beijing Institute of Technology (China)
Robert E. Parks, Optical Sciences Ctr./Univ. of Arizona (United States)

Published in SPIE Proceedings Vol. 1994:
Advanced Optical Manufacturing and Testing IV
Victor J. Doherty, Editor(s)

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