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Proceedings Paper

Application of design of experiments to a multilayer optical coating process
Author(s): Charles M. Egert; D. D. Schmoyer; James D. Howe
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Paper Abstract

An approach to applying design of experiments to multi-layer optical coating processes was explored. Two small designed experiments were first performed to determine the effect of process parameters on optical properties of silicon nitride and silicon dioxide single layer films. These results were used to predict the optimum operating region for the production of multi-layer dielectric mirror. A third experiment was then performed to test the prediction. The results of these experiments showed that while a quantitative optimization of the multi- layer process based on the single layer experiments was not possible; it was possible to qualitatively determine a region of parameter space for optimum mirror performance based on the single layer experiments.

Paper Details

Date Published: 1 February 1994
PDF: 8 pages
Proc. SPIE 1994, Advanced Optical Manufacturing and Testing IV, (1 February 1994); doi: 10.1117/12.167962
Show Author Affiliations
Charles M. Egert, Oak Ridge National Lab. (United States)
D. D. Schmoyer, Oak Ridge National Lab. (United States)
James D. Howe, EMF Corp. (United States)

Published in SPIE Proceedings Vol. 1994:
Advanced Optical Manufacturing and Testing IV
Victor J. Doherty, Editor(s)

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