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Proceedings Paper

Laser-annealed thin-film fiber-optic temperature sensor
Author(s): Glenn Beheim; Jorge L. Sotomayor; Meg L. Tuma; Massood Tabib-Azar
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Paper Abstract

A fiber-optic temperature sensor has been fabricated by sputtering a silicon film, together with some protective overlayers, directly onto the end of an optical fiber. The approximately one- micrometers thick silicon film serves as a Fabry-Perot etalon whose resonant wavelengths vary as functions of temperature due to changes in the film's refractive index. To manufacture a sensor with adequate long-term stability, the initially amorphous silicon film must be annealed. Laser annealing has been found to be a promising means to stabilize the silicon film's structure without degrading the optical fiber's protective buffer coating.

Paper Details

Date Published: 1 February 1994
PDF: 5 pages
Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); doi: 10.1117/12.167561
Show Author Affiliations
Glenn Beheim, NASA Lewis Research Ctr. (United States)
Jorge L. Sotomayor, NASA Lewis Research Ctr. (United States)
Meg L. Tuma, NASA Lewis Research Ctr. (United States)
Massood Tabib-Azar, Case Western Reserve Univ. (United States)

Published in SPIE Proceedings Vol. 2045:
Laser-Assisted Fabrication of Thin Films and Microstructures
Ian W. Boyd, Editor(s)

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