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Proceedings Paper

Waveguide excimer laser fabrication of 3D microstructures
Author(s): C. Paul Christensen
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Paper Abstract

Waveguide excimer lasers in combination with high-resolution imaging and precision motion control systems are capable of direct-write shaping of many polymers, ceramics, glasses, and metal films. Three-dimensional structures can be produced by scanning the worksurface under the focused beam and varying the energy delivered to the worksurface through use of various exposure algorithms. Using this technique, we have produced 3-D structures in polyimide and diamond that demonstrate high spatial resolution and good surface finish.

Paper Details

Date Published: 1 February 1994
PDF: 5 pages
Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); doi: 10.1117/12.167552
Show Author Affiliations
C. Paul Christensen, Potomac Photonics, Inc. (United States)

Published in SPIE Proceedings Vol. 2045:
Laser-Assisted Fabrication of Thin Films and Microstructures
Ian W. Boyd, Editor(s)

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